Invention Grant
- Patent Title: Thin film transistor, method for manufacturing the same, array substrate, and display device
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Application No.: US15236696Application Date: 2016-08-15
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Publication No.: US10249735B2Publication Date: 2019-04-02
- Inventor: Jian Min , Xiaolong Li , Zhengyin Xu , Ping Song , Youwei Wang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Brooks Kushman P.C.
- Priority: CN201610124743 20160304
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/66 ; H01L21/28 ; H01L21/3105 ; H01L27/12 ; H01L29/786 ; H01L29/423

Abstract:
The present disclosure provides a TFT, its manufacturing method, an array substrate and a display device. The method includes steps of: forming a pattern of a gate electrode on a base substrate; forming a gate insulation layer with an even surface; forming a pattern of a polysilicon semiconductor layer; and forming patterns of a source electrode and a drain electrode. The step of forming the pattern of the polysilicon semiconductor layer includes: crystallizing the amorphous silicon layer, so as to form the polysilicon semiconductor layer.
Public/Granted literature
- US20170256631A1 THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING THE SAME, ARRAY SUBSTRATE, AND DISPLAY DEVICE Public/Granted day:2017-09-07
Information query
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