Invention Grant
- Patent Title: Multispectral imaging device and manufacturing method thereof
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Application No.: US15816176Application Date: 2017-11-17
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Publication No.: US10249662B2Publication Date: 2019-04-02
- Inventor: Zhongshou Huang
- Applicant: EXPANTRUM OPTOELECTRONICS
- Priority: CN201710713001 20170818
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L27/146 ; H01L31/0376 ; H01L31/20 ; H01L31/0224 ; H01L21/223 ; H01L31/103

Abstract:
The present disclosure provides a multispectral imaging device, comprising the following layers and components arranged in sequence following a direction of incident light: a color filter layer, comprising a plurality of color filters transparent for specific wavebands; a first transparent electrode layer continuously formed in imaging area; a first conversion layer continuously formed in imaging area to convert visible light to electric signals; a first flat topography comprising plurality of pixel electrodes and with surface roughness less than 5 nm; a second conversion layer to convert NIR light to electric signals; and circuit components to process the electric signals. Benefit from the first continuous conversion layer formed on the flat topography, high light utilization, low spectral cross-talk, low dark current are achieved in the multispectral imaging device.
Public/Granted literature
- US20190057988A1 MULTISPECTRAL IMAGING DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-02-21
Information query
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