Invention Grant
- Patent Title: Vertical memory devices and methods of manufacturing the same
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Application No.: US15692606Application Date: 2017-08-31
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Publication No.: US10249636B2Publication Date: 2019-04-02
- Inventor: Jang-Gn Yun , Zhiliang Xia , Ahn-Sik Moon , Se-Jun Park , Joon-Sung Lim , Sung-Min Hwang
- Applicant: Jang-Gn Yun , Zhiliang Xia , Ahn-Sik Moon , Se-Jun Park , Joon-Sung Lim , Sung-Min Hwang
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0157066 20151110
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L23/522 ; H01L23/528 ; H01L27/11582 ; H01L27/11565

Abstract:
A vertical memory device includes a channel, a dummy channel, a plurality of gate electrodes, and a support pattern. The channel extends in a first direction perpendicular to an upper surface of a substrate. The dummy channel extends from the upper surface of the substrate in the first direction. The plurality of gate electrodes are formed at a plurality of levels, respectively, spaced apart from each other in the first direction on the substrate. Each of the gate electrodes surrounds outer sidewalls of the channel and the dummy channel. The support pattern is between the upper surface of the substrate and a first gate electrode among the gate electrodes. The first gate electrode is at a lowermost one of the levels. The channel and the dummy channel contact each other between the upper surface of the substrate and the first gate electrode.
Public/Granted literature
- US20170365612A1 VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2017-12-21
Information query
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