Invention Grant
- Patent Title: Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatus
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Application No.: US15897477Application Date: 2018-02-15
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Publication No.: US10248030B2Publication Date: 2019-04-02
- Inventor: Toyohisa Tsuruda , Yuichiro Kunugimoto , Takafumi Hayama , Keishi Hamada
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2017-031172 20170222
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/30 ; H01L21/67 ; G06F17/30

Abstract:
A method for evaluating a process recipe used in a liquid processing apparatus that performs a liquid processing by supplying a processing liquid from a nozzle to a substrate while rotating a holding part horizontally holding the substrate about a vertical axis, includes: storing the process recipe in a first storage part, which includes time-series data of a first combination of parameter values including a position of the nozzle and a rotation speed of the substrate; reading the process recipe from the first storage part; reading a pre-prepared risk data from a second storage part, which is determined by associating a second combination of parameter values with a risk information corresponding to a liquid splash risk; and displaying an assisting data for the first combination of parameter values in the process recipe, based on the process recipe and the pre-prepared risk data read from the first and second storage parts.
Public/Granted literature
Information query
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