Laser displacement meter and laser ultrasonic inspection apparatus using the same
Abstract:
A laser displacement meter includes: a laser array beam source unit including a plurality of lasers emitting beams with different wavelengths; a lens array unit including a plurality of lenses for focusing laser beams; a reflected beam lens array unit including a plurality of focusing lenses for focusing the beam reflected on the surface of the object; an optical filter array unit including a plurality of optical filters through which the reflected beam is selectively transmitted; and a photodetector array unit including a plurality of photodetectors for detecting the beam transmitted through the optical filters.
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