Invention Grant
- Patent Title: Differential pressure measurement with film chamber
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Application No.: US15316782Application Date: 2015-06-09
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Publication No.: US10247637B2Publication Date: 2019-04-02
- Inventor: Daniel Wetzig , Silvio Decker
- Applicant: Inficon GmbH
- Applicant Address: DE Cologne
- Assignee: INFICON GmbH
- Current Assignee: INFICON GmbH
- Current Assignee Address: DE Cologne
- Agency: Kirton & McConkie
- Agent Craig Metcalf
- Priority: DE102014211228 20140612
- International Application: PCT/EP2015/062854 WO 20150609
- International Announcement: WO2015/189219 WO 20151217
- Main IPC: G01M3/32
- IPC: G01M3/32

Abstract:
Leak detection device for measuring the differential pressure between a test chamber (10) and a reference chamber, which can be separated from the test chamber (10) gas-tight by a first check valve (24), wherein a differential pressure sensor (34) is connected to the reference chamber and to the test chamber (10) in order to measure the differential pressure between the internal pressure of the reference chamber and the internal pressure of the test chamber (10), characterized in that the test chamber (10) and the reference chamber each have at least one wall region formed from a flexible film, wherein the ratio of the test chamber volume (20) to the surface area of the flexible wall region of the test chamber (10) adjacent to the test chamber volume (20) and the ratio of the reference chamber volume to the surface area of the flexible wall region of the reference chamber adjacent to the reference chamber volume are substantially equal.
Public/Granted literature
- US20180149553A1 DIFFERENTIAL PRESSURE MEASUREMENT WITH FILM CHAMBER Public/Granted day:2018-05-31
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