Invention Grant
- Patent Title: Stacked or unstacked MEMS pressure sensor with through-hole cap and plurality of chip capacitors
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Application No.: US15499639Application Date: 2017-04-27
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Publication No.: US10247629B2Publication Date: 2019-04-02
- Inventor: Jen-Huang Albert Chiou
- Applicant: Continental Automotive Systems, Inc.
- Applicant Address: US MI Auburn Hills
- Assignee: Continental Automotive Systems, Inc.
- Current Assignee: Continental Automotive Systems, Inc.
- Current Assignee Address: US MI Auburn Hills
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B3/00

Abstract:
A MEMS pressure sensing element and integrated circuit (IC) are mounted on a circuit board. The sensing element and IC can be either stacked or unstacked. Bond wires connect the IC to the circuit board. Other bond wires connect the sensing element to the IC. A cap covers the sensing element and IC. The cap is attached to the circuit board and has a small hole in it, through which viscous gel is inserted. The gel encapsulates the MEMS sensing element, IC and bond wires in the cap. The hole also allows pressurized fluid to enter the cap and exert force on the MEMS pressure sensing element after encapsulation in the gel. Chip capacitors can also be mounted on the circuit board, outside the cap. Electrical signals are generated, which represent pressure applied to the MEMS pressure sensing element through the hole and gel.
Public/Granted literature
- US20180313709A1 MEMS PRESSURE SENSOR WITH THROUGH-HOLE CAP Public/Granted day:2018-11-01
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