- Patent Title: Diamond substrate and method for manufacturing diamond substrate
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Application No.: US15115387Application Date: 2015-02-02
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Publication No.: US10246794B2Publication Date: 2019-04-02
- Inventor: Hideo Aida , Koji Koyama , Kenjiro Ikejiri , Seongwoo Kim
- Applicant: NAMIKI SEIMITSU HOUSEKI KABUSHIKIKAISHA
- Applicant Address: JP Tokyo
- Assignee: ADAMANT NAMIKI PRECISION JEWEL CO., LTD.
- Current Assignee: ADAMANT NAMIKI PRECISION JEWEL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Cantor Colburn LLP
- Priority: JP2014-020565 20140205
- International Application: PCT/JP2015/052792 WO 20150202
- International Announcement: WO2015/119067 WO 20150813
- Main IPC: C30B25/00
- IPC: C30B25/00 ; C30B25/18 ; C30B25/02 ; C30B29/04 ; C30B25/20 ; C30B29/60 ; C23C16/27 ; C30B25/10 ; H01L21/02 ; H01L21/78 ; H01L29/04 ; H01L29/16 ; H01L29/34 ; C30B23/02
Abstract:
The crystal plane in the interior of the diamond substrate has a curvature higher than 0 km−1 and equal to or lower than 1500 km−1 by preparing a base substrate, forming a plurality of pillar-shaped diamonds formed of diamond single crystals on one side of the base substrate, causing diamond single crystals to grow from tips of each pillar-shaped diamond, coalescing each of the diamond single crystals grown from the tips of each pillar-shaped diamond to form a diamond substrate layer, separating the diamond substrate layer from the base substrate, and manufacturing the diamond substrate from the diamond substrate layer.
Public/Granted literature
- US20170009377A1 DIAMOND SUBSTRATE AND METHOD FOR MANUFACTURING DIAMOND SUBSTRATE Public/Granted day:2017-01-12
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