Invention Grant
- Patent Title: Gas purifier
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Application No.: US15614409Application Date: 2017-06-05
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Publication No.: US10245554B2Publication Date: 2019-04-02
- Inventor: Abneesh Srivastava , Thomas Richard Gaffney , Joshua T. Cook , Peter K. Shorgen , Daimhin Paul Murphy , Stenio da Costa Pereira
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- Main IPC: B01D53/86
- IPC: B01D53/86 ; C01B21/04 ; C01B3/56 ; C01B3/58 ; C01B23/00 ; B01D53/28 ; B01D53/75 ; B01J29/14 ; B01D53/26
Abstract:
The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.
Public/Granted literature
- US20170333841A1 Gas Purifier Public/Granted day:2017-11-23
Information query
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