Invention Grant
- Patent Title: 3-dimensional non-volatile memory device and method of fabricating the same
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Application No.: US15598539Application Date: 2017-05-18
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Publication No.: US10243000B2Publication Date: 2019-03-26
- Inventor: Hyun Chul Sohn , Hee Do Na , Young Mo Kim
- Applicant: UNIVERSITY-INDUSTRY FOUNDATION (UIF), YONSEI UNIVERSITY
- Applicant Address: KR Seoul
- Assignee: UNIVERSITY-INDUSTRY FOUNDATION (UIF), YONSEI UNIVERSITY
- Current Assignee: UNIVERSITY-INDUSTRY FOUNDATION (UIF), YONSEI UNIVERSITY
- Current Assignee Address: KR Seoul
- Priority: KR10-2016-0061462 20160519
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L27/11582 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157

Abstract:
Provided are a 3-dimensional non-volatile memory device and a method of fabricating the same. The 3-dimensional non-volatile memory device may include a substrate; semiconductor pillars, which are arranged at a certain interval in a first direction and a second direction different from the first direction; a string isolation film, which is arranged between the semiconductor pillars arranged in the first direction among the semiconductor pillars and extends in the first direction and a third direction vertical to the main surface of the substrate; first sub-electrodes repeatedly stacked on the substrate in the third direction; second sub-electrodes, which are electrically isolated from the first sub-electrodes by the string isolation film, and are repeatedly stacked on the substrate in the third direction; and information storage films including a first information storage film and a second information storage film.
Public/Granted literature
- US20170338243A1 3-DIMENSIONAL NON-VOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2017-11-23
Information query
IPC分类: