Invention Grant
- Patent Title: Hybrid vapor phase-solution phase growth techniques for improved CZT(S,Se) photovoltaic device performance
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Application No.: US15342618Application Date: 2016-11-03
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Publication No.: US10230014B2Publication Date: 2019-03-12
- Inventor: Liang-Yi Chang , Talia S. Gershon , Richard A. Haight , Yun Seog Lee
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Vazken Alexanian; Michael J. Chang, LLC
- Main IPC: B05D5/12
- IPC: B05D5/12 ; H01L31/065 ; H01L31/032 ; H01L31/0749 ; H01L31/18 ; H01L31/0224 ; H01L21/02 ; H01L31/072 ; H01L31/0216 ; H01L31/0392

Abstract:
A hybrid vapor phase-solution phase CZT(S,Se) growth technique is provided. In one aspect, a method of forming a kesterite absorber material on a substrate includes the steps of: depositing a layer of a first kesterite material on the substrate using a vapor phase deposition process, wherein the first kesterite material includes Cu, Zn, Sn, and at least one of S and Se; annealing the first kesterite material to crystallize the first kesterite material; and depositing a layer of a second kesterite material on a side of the first kesterite material opposite the substrate using a solution phase deposition process, wherein the second kesterite material includes Cu, Zn, Sn, and at least one of S and Se, wherein the first kesterite material and the second kesterite material form a multi-layer stack of the absorber material on the substrate. A photovoltaic device and method of formation thereof are also provided.
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