Invention Grant
- Patent Title: Semiconductor device
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Application No.: US15252466Application Date: 2016-08-31
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Publication No.: US10229994B2Publication Date: 2019-03-12
- Inventor: Tatsuo Shimizu , Ryosuke Iijima
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-179039 20150911
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/16 ; H01L29/47

Abstract:
A semiconductor device of an embodiment includes an SiC layer having a first and a second plane, an n-type first SiC region in the SiC layer, p-type second SiC regions between the first SiC region and the first plane, n-type third SiC regions between the second SiC regions and the first plane, a gate electrode provided between two p-type second SiC regions, a gate insulating film provided between the gate electrode and the second SiC regions, a metal layer provided between two p-type second SiC regions, and having a work function of 6.5 eV or more, and a first electrode electrically connected to the metal layer, and a second electrode, the SiC layer provided between the first electrode and the second electrode, and a part of the first SiC region is disposed between the gate insulating film and the metal layer.
Public/Granted literature
- US20170077299A1 SEMICONDUCTOR DEVICE Public/Granted day:2017-03-16
Information query
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