Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US15686292Application Date: 2017-08-25
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Publication No.: US10229924B2Publication Date: 2019-03-12
- Inventor: Wataru Sakamoto , Tatsuya Kato , Yuta Watanabe , Katsuyuki Sekine , Toshiyuki Iwamoto , Fumitaka Arai
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L27/11556 ; H01L23/528 ; H01L27/11521

Abstract:
A semiconductor memory device according to an embodiment includes first and second semiconductor pillars extending in a first direction and being arranged along a second direction, first and second interconnects extending in a third direction and being provided between the first semiconductor pillar and the second semiconductor pillar, a first electrode provided between the first semiconductor pillar and the first interconnect, a second electrode provided between the second semiconductor pillar and the second interconnect, third and fourth interconnects extending in the second direction, a first contact contacting the first semiconductor pillar and being connected to the third interconnect, and a second contact contacting the second semiconductor pillar and being connected to the fourth interconnect. The third and fourth interconnects each pass through both a region directly above the first semiconductor pillar and a region directly above the second semiconductor pillar.
Public/Granted literature
- US20170352672A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2017-12-07
Information query
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