Invention Grant
- Patent Title: Electrostatic discharge devices and methods of manufacture
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Application No.: US15826953Application Date: 2017-11-30
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Publication No.: US10229905B2Publication Date: 2019-03-12
- Inventor: Huiming Bu , Junjun Li , Theodorus E. Standaert , Tenko Yamashita
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Steven J. Meyers; Andrew M. Calderon
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L27/12 ; H01L21/84 ; H01L29/78 ; H01L29/66

Abstract:
Electrostatic discharge (ESD) devices and methods of manufacture are provided. The method includes forming a plurality of fin structures and a mesa structure from semiconductor material. The method further includes forming an epitaxial material with doped regions on the mesa structure and forming gate material over at least the plurality of fin structures. The method further includes planarizing at least the gate material such that the gate material and the epitaxial material are of a same height. The method further includes forming contacts in electrical connection with respective ones of the doped regions of the epitaxial material.
Public/Granted literature
- US20180090484A1 ELECTROSTATIC DISCHARGE DEVICES AND METHODS OF MANUFACTURE Public/Granted day:2018-03-29
Information query
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