- Patent Title: Substrate alignment apparatus, substrate processing apparatus, substrate arrangement apparatus, substrate alignment method, substrate processing method, and substrate arrangement method
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Application No.: US15693708Application Date: 2017-09-01
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Publication No.: US10229848B2Publication Date: 2019-03-12
- Inventor: Yukiteru Miyamoto
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2016-190860 20160929
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/68 ; H01L21/687 ; H01L21/67 ; H01L21/02 ; H01L21/677

Abstract:
In a substrate alignment apparatus, a motor sequentially rotates a plurality of substrates in a circumferential direction, the substrates being to be held in a vertical posture at a lower edge portion by a substrate holder. A controller controls the motor on the basis of warpage-and-notch-position information and input information that is input about a warped state of the substrates, to determine circumferential positions of the notches of the substrates. This reduces a distance in a thickness direction between a lower edge portion and an upper edge of each substrate that is held by the substrate holder. As a result, it is possible to facilitate handling of a plurality of substrates held by the substrate holder.
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