Invention Grant
- Patent Title: Metallic blocking layer for reliable interconnects and contacts
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Application No.: US15864877Application Date: 2018-01-08
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Publication No.: US10224281B2Publication Date: 2019-03-05
- Inventor: Praneet Adusumilli , Alexander Reznicek , Oscar van der Straten , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel P. Morris, Esq.
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/522 ; H01L23/532 ; H01L21/768

Abstract:
A semiconductor structure is provided that includes a first interconnect dielectric layer containing a first interconnect metal structure embedded therein. A second interconnect dielectric layer containing a second interconnect metal structure embedded therein is located atop the first interconnect dielectric layer. A metallic blocking layer is present that separates a surface of the second interconnect metal structure from a surface of the first interconnect metal structure. The metallic blocking layer has a lower resistivity than the first and second interconnect metal structures. The metallic blocking layer prevents electromigration of metallic ions from the first and second interconnect metal structure.
Public/Granted literature
- US20180151489A1 METALLIC BLOCKING LAYER FOR RELIABLE INTERCONNECTS AND CONTACTS Public/Granted day:2018-05-31
Information query
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