Sensor device including one or more metal-dielectric optical filters
Abstract:
A sensor device including one or more sensor elements and one or more optical filters is provided. The one or more optical filters each include a plurality of dielectric layers and a plurality of metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.
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