Invention Grant
- Patent Title: Beam current measuring device and charged particle beam irradiation apparatus
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Application No.: US15271854Application Date: 2016-09-21
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Publication No.: US10222400B2Publication Date: 2019-03-05
- Inventor: Hideyasu Une , Tetsuro Yamamoto , Yoshihiro Takigami
- Applicant: NISSIN ION EQUIPMENT CO., LTD.
- Applicant Address: JP Kyoto-shi, Kyoto
- Assignee: NISSIN ION EQUIPMENT CO., LTD.
- Current Assignee: NISSIN ION EQUIPMENT CO., LTD.
- Current Assignee Address: JP Kyoto-shi, Kyoto
- Agency: Sughrue Mion, PLLC
- Main IPC: G01R15/24
- IPC: G01R15/24 ; G01R19/00 ; H01J25/12
Abstract:
A beam current measuring device capable of performing measurement of a beam current distribution of a charged particle beam seamlessly and continuously in an arbitrary direction is provided. The beam current measuring device includes collector electrodes whose detection regions seamlessly continue in an arrangement direction thereof.
Public/Granted literature
- US20180080959A1 BEAM CURRENT MEASURING DEVICE AND CHARGED PARTICLE BEAM IRRADIATION APPARATUS Public/Granted day:2018-03-22
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