Invention Grant
- Patent Title: Measurement device and measurement method
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Application No.: US15314018Application Date: 2015-05-01
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Publication No.: US10222363B2Publication Date: 2019-03-05
- Inventor: Akitake Tamura
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2014-110578 20140528
- International Application: PCT/JP2015/063080 WO 20150501
- International Announcement: WO2015/182333 WO 20151203
- Main IPC: G01N33/15
- IPC: G01N33/15 ; G01N21/64 ; G01N33/543 ; G01N33/569 ; G01N33/58 ; G01N1/22 ; G01N1/40 ; G01N15/00 ; G01N15/06 ; G01N15/14

Abstract:
A measurement device includes: a capturing part for causing a liquid to capture detection target particles contained in a gas and causing a fluorescent substance specifically bondable to the detection target particles to be bonded to the detection target particles; a droplet forming part for forming aerosol-like droplets from the liquid; and a measurement part for irradiating light onto the droplets and measuring the fluorescence intensity of the droplets. The capturing part includes a cyclone which swirls the gas introduced from a gas introduction part in a circumferential direction, separates the detection target particles toward a wall surface of the cyclone body under a centrifugal force, introduces the liquid from the liquid introduction part, causes the liquid to capture the detection target particles separated toward the wall surface and continuously supplies the liquid to the droplet forming part.
Public/Granted literature
- US20170191974A1 MEASUREMENT DEVICE AND MEASUREMENT METHOD Public/Granted day:2017-07-06
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