Invention Grant
- Patent Title: Observation device including illumination optical system and extraction unit and observation method
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Application No.: US15275707Application Date: 2016-09-26
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Publication No.: US10222334B2Publication Date: 2019-03-05
- Inventor: Fumihiro Dake , Tomoko Ujike , Hiroki Yazawa
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-075614 20140401
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G01N21/65 ; G02B21/00

Abstract:
A super-resolution observation device includes an illumination optical system collecting a first illuminating light having a first optical frequency ω1 on a first region of an observation object, collecting a second illuminating light having a second optical frequency ω2′ on a second region partially overlapping the first region, and collecting a third illuminating light having a third optical frequency ω2 on a third region containing a non-overlap region which is a region of the first region and does not overlap the second region; and an extraction unit extracting a signal light generated in accordance with a change in an energy level of a substance in the non-overlap region from a light generated in all of the first region, the second region, and the third region.
Public/Granted literature
- US20170082545A1 SUPER-RESOLUTION OBSERVATION DEVICE AND SUPER-RESOLUTION OBSERVATION METHOD Public/Granted day:2017-03-23
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