Invention Grant
- Patent Title: Cold cathode ionization gauge and cold cathode ionization gauge cartridge
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Application No.: US15797040Application Date: 2017-10-30
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Publication No.: US10222287B2Publication Date: 2019-03-05
- Inventor: Yohsuke Kawasaki , Itaru Enomoto , Isao Mochizuki
- Applicant: CANON ANELVA CORPORATION
- Applicant Address: JP Kawasaki-Shi
- Assignee: CANON ANELVA CORPORATION
- Current Assignee: CANON ANELVA CORPORATION
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Venable LLP
- Main IPC: G01L21/34
- IPC: G01L21/34 ; H01J41/06

Abstract:
Provided are an excellent cold cathode ionization gauge and an excellent cold cathode ionization gauge cartridge. The cold cathode ionization gauge includes: an anode; a cathode, which has a tubular shape, and is arranged to surround the anode; a seal for sealing one opening of the cathode; a first member, which faces the seal inside the cathode, and has a through hole formed therein; a partition for partitioning a space surrounded by the cathode, the seal, and the first member into a first space that the first member faces and a second space that the seal faces; and a light source, which is arranged in the partition or the second space, and is configured to emit an electromagnetic wave, in which a gap is formed between at least part of an outer peripheral portion of the partition and the cathode.
Public/Granted literature
- US20180259417A1 COLD CATHODE IONIZATION GAUGE AND COLD CATHODE IONIZATION GAUGE CARTRIDGE Public/Granted day:2018-09-13
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