Invention Grant
- Patent Title: Vibrator element, vibrator, gyro sensor, electronic apparatus, and moving object
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Application No.: US15083376Application Date: 2016-03-29
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Publication No.: US10222212B2Publication Date: 2019-03-05
- Inventor: Keiji Nakagawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-076035 20150402
- Main IPC: G01C19/5607
- IPC: G01C19/5607 ; H03H9/215 ; H03H9/05
Abstract:
A vibrator element includes a drive arm. The drive arm includes an upper surface, a lower surface, a groove opened to the upper surface, and a groove opened to the lower surface. The upper surface is disposed to be deviated by L1 on a +X axis side from the lower surface. The groove is disposed to be deviated by L2 on the +X axis side from the groove. L1 and L2 satisfy a relation of L2/L1>0.
Public/Granted literature
- US20160290802A1 VIBRATOR ELEMENT, VIBRATOR, GYRO SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT Public/Granted day:2016-10-06
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