Displacement sensor, displacement detection apparatus, and displacement detection method
Abstract:
A displacement sensor includes: a projection unit projecting emitted light toward a detection target surface of a detection target object; an objective optical system converging the emitted light toward the detection target surface and admitting reflected light resulting from diffuse reflection of the emitted light by the detection target surface; a baffle plate having openings each allowing one of portions of transmitted light resulting from the admission by the objective optical system to pass therethrough; an image capture unit capturing an image; image forming optical systems allowing each of the portions of the transmitted light resulting from the admission by the objective optical system to form an image on the image capture unit; and a signal processing unit calculating a distance from the detection target surface based on a luminance centroid of each of spots captured by the image capture unit.
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