- Patent Title: Interferometric distance measuring arrangement for measuring surfaces and corresponding method with at least two parallel measurement channels and wavelength ramp
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Application No.: US14416514Application Date: 2013-07-18
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Publication No.: US10222197B2Publication Date: 2019-03-05
- Inventor: Thomas Jensen
- Applicant: HEXAGON TECHNOLOGY CENTER GMBH
- Applicant Address: CH Heerbrugg
- Assignee: HEXAGON TECHNOLOGY CENTER GMBH
- Current Assignee: HEXAGON TECHNOLOGY CENTER GMBH
- Current Assignee Address: CH Heerbrugg
- Agency: Maschoff Brennan
- Priority: EP12177615 20120724
- International Application: PCT/EP2013/065224 WO 20130718
- International Announcement: WO2014/016201 WO 20140130
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/14

Abstract:
The invention relates to an interferometric distance measuring arrangement for measuring surfaces, using at least one laser which can be tuned for generating measurement radiation modulated by a wave length ramp, an optical beam path with an optical transmitting system for emitting the measurement radiation to the surface and an optical capturing system for capturing the measurement radiation back-scattered by the surface, comprising a measuring arm and a reference arm and a radiation detector and an evaluation unit for determining the distance from a reference point of the distance measuring device to the surface. Channels are defined by at least one beamsplitter n≥2 for the parallel emission of measurement radiation, respectively, one different sub area of the wave length ramp is allocated to said channels at a predetermined emission time point.
Public/Granted literature
- US20150176970A1 INTERFEROMETRIC DISTANCE MEASURING ARRANGEMENT AND CORRESPONDING METHOD Public/Granted day:2015-06-25
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