A circuit device includes an A/D conversion unit that performs A/D conversion of a temperature detection voltage applied from a temperature sensor unit and outputs temperature detection data, a processing unit that performs a temperature compensation process of an oscillation frequency on the basis of the temperature detection data, and an oscillation signal generation circuit that includes a D/A conversion unit and an oscillation circuit and generates an oscillation signal using frequency control data received from the processing unit and a vibrator. The D/A conversion unit includes modulation circuit that receives the frequency control data of (n+m) bits and modulates n-bit data on the basis of m-bit data of the frequency control data, a D/A converter that performs D/A conversion of the modulated n-bit data, and a filter circuit that smoothes the output voltage of the D/A converter.