Semiconductor device and method for producing semiconductor device
Abstract:
A semiconductor device includes a first pillar-shaped semiconductor layer formed on a semiconductor substrate; a first first-conductivity-type semiconductor layer formed in the first pillar-shaped semiconductor layer; a third first-conductivity-type semiconductor layer formed in the first pillar-shaped semiconductor layer and located at a higher position than the first first-conductivity-type semiconductor layer; a first gate insulating film formed so as to surround a region of the first pillar-shaped semiconductor layer sandwiched between the first first-conductivity-type semiconductor layer and the third first-conductivity-type semiconductor layer; a first gate formed so as to surround the first gate insulating film; a second gate insulating film formed so as to surround a region of the first pillar-shaped semiconductor layer sandwiched between the first first-conductivity-type semiconductor layer and the third first-conductivity-type semiconductor layer; and a second gate formed so as to surround the second gate insulating film, wherein the first gate and the second gate are mutually connected.
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