- Patent Title: Semiconductor device and method for producing semiconductor device
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Application No.: US14743612Application Date: 2015-06-18
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Publication No.: US10217665B2Publication Date: 2019-02-26
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Priority: WOPCT/JP2014/072563 20140828
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L27/115 ; H01L21/768 ; H01L29/66 ; H01L29/78

Abstract:
A semiconductor device includes a first pillar-shaped semiconductor layer formed on a semiconductor substrate; a first first-conductivity-type semiconductor layer formed in the first pillar-shaped semiconductor layer; a third first-conductivity-type semiconductor layer formed in the first pillar-shaped semiconductor layer and located at a higher position than the first first-conductivity-type semiconductor layer; a first gate insulating film formed so as to surround a region of the first pillar-shaped semiconductor layer sandwiched between the first first-conductivity-type semiconductor layer and the third first-conductivity-type semiconductor layer; a first gate formed so as to surround the first gate insulating film; a second gate insulating film formed so as to surround a region of the first pillar-shaped semiconductor layer sandwiched between the first first-conductivity-type semiconductor layer and the third first-conductivity-type semiconductor layer; and a second gate formed so as to surround the second gate insulating film, wherein the first gate and the second gate are mutually connected.
Public/Granted literature
- US20160064508A1 SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE Public/Granted day:2016-03-03
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