Invention Grant
- Patent Title: Current threshold response mode for arc management
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Application No.: US15002213Application Date: 2016-01-20
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Publication No.: US10217618B2Publication Date: 2019-02-26
- Inventor: Skip B. Larson , Kenneth E. Nauman, Jr.
- Applicant: Advanced Energy Industries, Inc.
- Applicant Address: US CO Fort Collins
- Assignee: Advanced Energy Industries, Inc.
- Current Assignee: Advanced Energy Industries, Inc.
- Current Assignee Address: US CO Fort Collins
- Agency: Neugeboren O'Dowd PC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01J37/32

Abstract:
This disclosure describes systems, methods, and apparatuses for extinguishing electrical arcs in a plasma processing chamber. Once an arc is detected, the steady state voltage provided to the plasma processing chamber can be reduced, and the current being provided to the chamber decays below a steady state value as the arc is extinguished. When the current falls to or below a current threshold, the voltage can be ramped back up bringing the voltage and current back to steady state values. This technique enables power to return to a steady state level faster than traditional arc mitigation techniques.
Public/Granted literature
- US20160141155A1 Current Threshold Response Mode for Arc Management Public/Granted day:2016-05-19
Information query
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