Invention Grant
- Patent Title: Device for holding and rotating plate shaped article
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Application No.: US15541015Application Date: 2015-07-10
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Publication No.: US10204818B2Publication Date: 2019-02-12
- Inventor: Bao Zhang , Dandan Ji , Ruiting Wang , Yi Wu
- Applicant: NAURA TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: NAURA TECHNOLOGY GROUP CO., LTD.
- Current Assignee: NAURA TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Tianchen LLC.
- Priority: CN201410851693 20141231
- International Application: PCT/CN2015/083727 WO 20150710
- International Announcement: WO2016/107131 WO 20160707
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67

Abstract:
A device for holding and rotating a plate shaped article comprises a group of fixed pins and a group of pivot pins arranged along the circumference of the movable base in a manner that each pivot pin opposites a fixed pin, and also comprises magnetic bodies positioned within and outside two opposing sides of the pivot pins. Each of the pivot pins can be driven to rotate around its pivot back and forth under the magnetic repulsive force between two adjacent magnetic bodies, so as to release or clamp the plate shaped article. The present invention has advantages of simple structure, convenient and reliable action control, controllable clamping force and good compatibility with various processing chambers.
Public/Granted literature
- US20170358480A1 DEVICE FOR HOLDING AND ROTATING PLATE SHAPED ARTICLE Public/Granted day:2017-12-14
Information query
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