Invention Grant
- Patent Title: Method for improving threshold voltage of oxide semiconductor thin film transistor
-
Application No.: US15561982Application Date: 2017-08-18
-
Publication No.: US10204800B2Publication Date: 2019-02-12
- Inventor: Xuanyun Wang
- Applicant: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Applicant Address: CN Wuhan, Hubei
- Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Wuhan, Hubei
- Agent Leong C. Lei
- Priority: CN201710477261 20170621
- International Application: PCT/CN2017/098105 WO 20170818
- Main IPC: H01L21/463
- IPC: H01L21/463 ; H01L29/66

Abstract:
The invention provides a method for improving threshold voltage of oxide semiconductor TFT, by bending the oxide semiconductor TFT for a default number of times or bending the oxide semiconductor TFT for a default duration, by bending the oxide semiconductor TFT to compress or stretch the oxide semiconductor layer to change the distance among the atoms in the channel of the oxide semiconductor TFT so as to change the energy difference between the inter-atom bonding orbital and anti-bonding orbital, resulting in controlling the threshold voltage of the oxide semiconductor TFT within a proper range to achieve improving the threshold voltage of the oxide semiconductor TFT.
Public/Granted literature
- US20180374713A1 METHOD FOR IMPROVING THRESHOLD VOLTAGE OF OXIDE SEMICONDUCTOR THIN FILM TRANSISTOR Public/Granted day:2018-12-27
Information query
IPC分类: