Invention Grant
- Patent Title: Piezoelectric element and piezoelectric element applied device
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Application No.: US15137240Application Date: 2016-04-25
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Publication No.: US10199559B2Publication Date: 2019-02-05
- Inventor: Kazuya Kitada , Masayuki Omoto
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-109078 20150528
- Main IPC: H01L41/18
- IPC: H01L41/18 ; B41J2/14 ; H01L41/08 ; H01L41/09 ; H01L41/187 ; H01L41/047 ; H01L41/317 ; H01L41/318

Abstract:
There is provided a piezoelectric element which includes a first electrode which is formed on a substrate, a piezoelectric layer which is formed on the first electrode, and is formed from a compound oxide having an ABO3 type perovskite structure in which potassium (K), sodium (Na), niobium (Nb), and manganese (Mn) are provided, and a second electrode which is formed on the piezoelectric layer. The manganese includes bivalent manganese (Mn2+), trivalent manganese (Mn3+), and tetravalent manganese (Mn4+). A molar ratio (Mn2+/Mn3++Mn4+) of the bivalent manganese to a sum of the trivalent manganese and the tetravalent manganese is equal to or greater than 0.31.
Public/Granted literature
- US20170345994A1 PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC ELEMENT APPLIED DEVICE Public/Granted day:2017-11-30
Information query
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