Invention Grant
- Patent Title: Under-channel gate transistors
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Application No.: US15495237Application Date: 2017-04-24
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Publication No.: US10199503B2Publication Date: 2019-02-05
- Inventor: Marc A. Bergendahl , Kangguo Cheng , Gauri Karve , Fee Li Lie , Eric R. Miller , John R. Sporre , Sean Teehan
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/28 ; H01L29/423 ; H01L29/06 ; H01L29/66 ; H01L21/8234

Abstract:
Transistors and methods of forming the same include forming a semiconductor fin from a first material on dielectric layer. Material is etched away from the dielectric layer directly underneath a channel region of the semiconductor fin, with the semiconductor fin still being supported by the dielectric layer in a source and drain region. A gate stack is formed around the channel region of the semiconductor fin, with a portion of the gate stack underneath the semiconductor fin being larger than a portion of the gate stack above the semiconductor fin.
Public/Granted literature
- US20180308978A1 UNDER-CHANNEL GATE TRANSISTORS Public/Granted day:2018-10-25
Information query
IPC分类: