Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US15262433Application Date: 2016-09-12
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Publication No.: US10199498B2Publication Date: 2019-02-05
- Inventor: Osamu Matsuura , Hideki Inokuma , Masanari Fujita
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/1157 ; H01L27/11582

Abstract:
According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a pillar structure, at least one charge storage film, and a first electrode. The stacked body includes electrode films stacked separately from each other. The pillar structure is provided in the stacked body and includes a semiconductor layer extending in stacking direction of the stacked body. The charge storage film is provided between the semiconductor layer and the electrode films. The first electrode is provided in the stacked body, spreads in the stacking direction and a first direction along a surface of the substrate, and contacting the substrate. The first electrode includes a first portion containing a material having conductivity and a second portion containing a material that a linear expansion coefficient is lower than a linear expansion coefficient of silicon, and positioned at a substrate side than the first portion in the stacking direction.
Public/Granted literature
- US20170229577A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2017-08-10
Information query
IPC分类: