Invention Grant
- Patent Title: Transistor and method for forming the same
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Application No.: US15280214Application Date: 2016-09-29
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Publication No.: US10199478B2Publication Date: 2019-02-05
- Inventor: Herb He Huang , Clifford Ian Drowley , Hai Ting Li , Ji Guang Zhu
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION
- Applicant Address: CN Shanghai CN Ningbo
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION
- Current Assignee Address: CN Shanghai CN Ningbo
- Agency: Anova Law Group, PLLC
- Priority: CN201510654312 20151010
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/786 ; H01L21/306 ; H01L21/311 ; H01L21/762

Abstract:
The present disclosure provides a method for forming a transistor, including: forming a base structure, containing a first gate structure, an active layer covering the first gate structure, and an insulating structure in the active layer; forming a second gate structure on the active layer; forming a source-drain region, including a source region and a drain region in the active layer each on a different side of the second gate structure; and forming a first interlayer dielectric layer covering the base structure and the second gate structure. The method also includes: forming a first contact hole that exposes the first gate structure by etching the first interlayer dielectric layer and the insulating structure; and forming a second contact hole that exposes the second gate structure and a third contact hole that exposes the drain region by etching the first interlayer dielectric layer.
Public/Granted literature
- US20170104084A1 TRANSISTOR AND METHOD FOR FORMING THE SAME Public/Granted day:2017-04-13
Information query
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