Invention Grant
- Patent Title: Fabrication of optical metasurfaces
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Application No.: US15799654Application Date: 2017-10-31
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Publication No.: US10199415B2Publication Date: 2019-02-05
- Inventor: Gleb M. Akselrod , Erik E. Josberger , Mark C. Weidman
- Applicant: Elwha LLC
- Applicant Address: US WA Bellevue
- Assignee: Elwha LLC
- Current Assignee: Elwha LLC
- Current Assignee Address: US WA Bellevue
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/146 ; G02F1/29 ; G02B5/18 ; G03H1/04 ; H04N5/225 ; H04N5/374 ; G01S7/481 ; H01Q1/38 ; H01Q3/44 ; H01Q15/00 ; H01Q15/02 ; H01Q15/14 ; G01S17/10 ; G01S17/42 ; G01S17/89 ; G02F1/01 ; G02F1/1339 ; G02F1/1341 ; H01J37/317 ; H01J37/32

Abstract:
The method is provided for fabricating an optical metasurface. The method may include depositing a conductive layer over a holographic region of a wafer and depositing a dielectric layer over the conducting layer. The method may also include patterning a hard mask on the dielectric layer. The method may further include etching the dielectric layer to form a plurality of dielectric pillars with a plurality of nano-scale gaps between the pillars.
Public/Granted literature
- US20180240653A1 FABRICATION OF OPTICAL METASURFACES Public/Granted day:2018-08-23
Information query
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