Invention Grant
- Patent Title: Semiconductor structures and fabrication methods thereof
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Application No.: US15821422Application Date: 2017-11-22
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Publication No.: US10199382B2Publication Date: 2019-02-05
- Inventor: Yong Li
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION,SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201611082506 20161130
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L27/11 ; H01L21/8238 ; H01L29/66 ; H01L27/092 ; H01L29/423 ; H01L29/49

Abstract:
A method for fabricating a semiconductor device includes forming a gate dielectric layer on a base substrate including an N-type logic region, a P-type logic region, a first pull down transistor (PDT) region, a second PDT region, and a pass gate transistor (PGT) region, forming a first work function layer (WFL) in the first N-type threshold-voltage (TV) region, the P-type logic region, the second PDT region, and the PGT region, forming a second WFL on the first WFL in the first P-type TV region, and forming a third WFL on the second WFL in the first P-type TV region, the first WFL in the second P-type TV region, and the gate dielectric layer in the second N-type TV region and the first PDT region. The thickness of the third WFL is smaller than the thickness of the first WFL. The method further includes forming a fourth WFL on the substrate.
Public/Granted literature
- US20180151573A1 SEMICONDUCTOR STRUCTURES AND FABRICATION METHODS THEREOF Public/Granted day:2018-05-31
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