Invention Grant
- Patent Title: Thin film transistor, manufacturing method thereof, and method for manufacturing array substrate
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Application No.: US15843796Application Date: 2017-12-15
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Publication No.: US10199236B2Publication Date: 2019-02-05
- Inventor: Dezhi Xu , Xianxue Duan , Kui Gong
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN CN
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN CN
- Agency: Brooks Kushman P.C.
- Priority: CN201710300075 20170428
- Main IPC: H01L21/467
- IPC: H01L21/467 ; H01L29/66 ; H01L21/308 ; H01L29/786 ; H01L27/32 ; H01L27/12
Abstract:
A thin film transistor, a manufacturing method thereof, and a method for manufacturing an array substrate are provided. The method for manufacturing the thin film transistor includes: forming an active layer film on a base; and forming a source electrode and a drain electrode of the thin film transistor using a conductive photoresist.
Public/Granted literature
- US20180315619A1 THIN FILM TRANSISTOR, MANUFACTURING METHOD THEREOF, AND METHOD FOR MANUFACTURING ARRAY SUBSTRATE Public/Granted day:2018-11-01
Information query
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