Invention Grant
- Patent Title: Target retaining apparatus
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Application No.: US14600915Application Date: 2015-01-20
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Publication No.: US10199204B2Publication Date: 2019-02-05
- Inventor: Srinivasa Yedla , Sundarapandian Reddy , Uday Pai , Kirankumar Savandaiah , Thanh X. Nguyen , Muhammad M. Rasheed , Jallepally Ravi
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: H01J37/34
- IPC: H01J37/34

Abstract:
Embodiments of target retaining apparatus and substrate processing chambers incorporating same are provided herein. In some embodiments, a target retaining apparatus includes a housing including a first slot and a second slot; a cam movably disposed in the housing, wherein movement of the cam is constrained along the first slot; a retaining arm movably coupled to the cam, wherein movement of the retaining arm is constrained along the second slot; a linking member including a first end rotatably coupled to the cam and a second end rotatably coupled to the retaining arm; and a biasing element biasing the cam towards a first position in which the retaining arm extends away from the housing.
Public/Granted literature
- US20150203960A1 TARGET RETAINING APPARATUS Public/Granted day:2015-07-23
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