Invention Grant
- Patent Title: Methods of fabricating magnetic memory devices
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Application No.: US15474388Application Date: 2017-03-30
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Publication No.: US10177307B2Publication Date: 2019-01-08
- Inventor: Junghoon Bak , Myoungsu Son , Boyoung Seo
- Applicant: Junghoon Bak , Myoungsu Son , Boyoung Seo
- Applicant Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2016-0114501 20160906
- Main IPC: H01L43/12
- IPC: H01L43/12 ; G11C14/00 ; H01L29/82 ; G11C11/56 ; G11C19/02 ; H01L27/22 ; G11C11/15 ; H01L43/02 ; H01L43/08

Abstract:
Disclosed is a method of fabricating a magnetic memory device. The method of a fabricating a magnetic memory device includes forming an interlayer dielectric layer on a substrate, forming a sacrificial pattern in the interlayer dielectric layer, forming a magnetic tunnel junction pattern on the sacrificial pattern, after forming the magnetic tunnel junction pattern, selectively removing the sacrificial pattern to form a bottom contact region in the interlayer dielectric layer, and forming a bottom contact in the bottom contact region.
Public/Granted literature
- US20180069175A1 METHODS OF FABRICATING MAGNETIC MEMORY DEVICES Public/Granted day:2018-03-08
Information query
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