Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus
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Application No.: US15860137Application Date: 2018-01-02
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Publication No.: US10172225B2Publication Date: 2019-01-01
- Inventor: Toru Suzuki , Tamotsu Abe , Osamu Wakabayashi , Tatsuya Yanagida
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2013-192036 20130917
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20

Abstract:
An extreme ultraviolet light generation apparatus may include: a chamber including a plasma generation region to which a target is supplied, the target being turned into plasma so that extreme ultraviolet light is generated in the chamber; a target supply part configured to supply the target to the plasma generation region by outputting the target as a droplet into the chamber; a droplet detector configured to detect the droplet traveling from the target supply part to the plasma generation region; an imaging part configured to capture an image of an imaging region containing the plasma generation region in the chamber; and a controller configured to control an imaging timing at which the imaging part captures the image of the imaging region, based on a detection timing at which the droplet detector detects the droplet.
Public/Granted literature
- US20180146536A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS Public/Granted day:2018-05-24
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