Invention Grant
- Patent Title: Extreme UV light generator
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Application No.: US15351988Application Date: 2016-11-15
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Publication No.: US10172224B2Publication Date: 2019-01-01
- Inventor: Takayuki Yabu , Hirokazu Hosoda , Takuya Ishii
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2014/069715 20140725
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20 ; G21F3/00

Abstract:
An extreme ultraviolet light generation apparatus may include: a chamber in which extreme ultraviolet light is generated from plasma generated by irradiating a target supplied into the chamber with a laser beam; a target generator that supplies the target into the chamber as a droplet; a droplet measurement unit that measures the droplet supplied from the target generator into the chamber; and a shielding member that shields the droplet measurement unit from electromagnetic waves emitted from the plasma, the droplet measurement unit including: a light source that emits continuous light to the droplet; a window provided in the chamber to allow the continuous light to transmit therethrough; and an optical sensor that receives the continuous light via the window. The shielding member includes a shielding body provided on the chamber side with respect to the window and configured to cover an optical path of the continuous light.
Public/Granted literature
- US20170064799A1 EXTREME UV LIGHT GENERATOR Public/Granted day:2017-03-02
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