Invention Grant
- Patent Title: Vacuum evaporation device and method thereof, and organic light-emitting display panel
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Application No.: US15486722Application Date: 2017-04-13
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Publication No.: US10170730B2Publication Date: 2019-01-01
- Inventor: Yuji Hamada , Jinghua Niu , Wei He , Honggang Yan , Lei Lv , Xiangcheng Wang
- Applicant: Shanghai Tianma AM-OLED Co., Ltd. , Tianma Micro-Electronics Co., Ltd.
- Applicant Address: CN Shanghai CN Shenzhen
- Assignee: SHANGHAI TIANMA AM-OLED CO., LTD.,TIANMA MICRO-ELECTRONICS CO., LTD.
- Current Assignee: SHANGHAI TIANMA AM-OLED CO., LTD.,TIANMA MICRO-ELECTRONICS CO., LTD.
- Current Assignee Address: CN Shanghai CN Shenzhen
- Agency: Anova Law Group, PLLC
- Priority: CN201611074944 20161128
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/56 ; C23C14/24 ; H01L51/50 ; C23C14/04 ; C23C14/06

Abstract:
A vacuum evaporation device, a vacuum evaporation method, and an organic light-emitting display panel are provided. The vacuum evaporation device comprises at least a first evaporation chamber. The first evaporation chamber includes at least one first organic material evaporation source and at least one first metal evaporation source. The at least one first organic material evaporation source is configured to evaporate a first organic material, and the at least one first metal evaporation source is configured to evaporate a first metal material. The at least one first organic material evaporation source and the at least one first metal evaporation source are controlled to perform evaporation simultaneously to generate blend doping of a first organic material and a first metal material on a substrate disposed within the first evaporation chamber.
Public/Granted literature
- US20170222191A1 VACUUM EVAPORATION DEVICE AND METHOD THEREOF, AND ORGANIC LIGHT-EMITTING DISPLAY PANEL Public/Granted day:2017-08-03
Information query
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