Invention Grant
- Patent Title: Non-planar transistor
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Application No.: US15447134Application Date: 2017-03-02
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Publication No.: US10170624B2Publication Date: 2019-01-01
- Inventor: Jhen-Cyuan Li , Nan-Yuan Huang , Shui-Yen Lu
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: TW104115466A 20150515
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/78 ; H01L29/66 ; H01L29/165

Abstract:
A non-planar transistor is provided. It includes a substrate, a fin structure, a gate structure, a first spacer structure and a source/drain region. The fin structure is disposed on the substrate, the gate structure is disposed on the fin structure. The fin structure includes an upper portion, a concave portion and a lower portion, and the concave portion is disposed between the upper portion and the lower portion. The first spacer structure is disposed on a sidewall of the gate structure. The first spacer structure includes a first spacer and a second spacer, wherein the first spacer is disposed between the second spacer, and a height of the first spacer is different from a height of the second spacer. The source/drain region is disposed in a semiconductor layer at two sides of the first spacer structure.
Public/Granted literature
- US20170179292A1 NON-PLANAR TRANSISTOR Public/Granted day:2017-06-22
Information query
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