Invention Grant
- Patent Title: Fabrication of an isolated dummy fin between active vertical fins with tight fin pitch
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Application No.: US15876368Application Date: 2018-01-22
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Publication No.: US10170596B2Publication Date: 2019-01-01
- Inventor: Kangguo Cheng , Peng Xu
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/088 ; H01L21/8234 ; H01L29/06 ; H01L29/49 ; H01L21/02 ; H01L21/28 ; H01L29/08 ; H01L29/10 ; H01L29/78 ; H01L21/8238
Abstract:
A method of forming an arrangement of active and inactive fins on a substrate, including forming at least three vertical fins on the substrate, forming a protective liner on at least three of the at least three vertical fins, removing at least a portion of the protective liner on the one of the at least three of the at least three of vertical fins, and converting the one of the at least three of the at least three vertical fins to an inactive vertical fin.
Public/Granted literature
- US20180158925A1 FABRICATION OF AN ISOLATED DUMMY FIN BETWEEN ACTIVE VERTICAL FINS WITH TIGHT FIN PITCH Public/Granted day:2018-06-07
Information query
IPC分类:
