Invention Grant
- Patent Title: Capacitors
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Application No.: US15417932Application Date: 2017-01-27
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Publication No.: US10170540B2Publication Date: 2019-01-01
- Inventor: Veeraraghavan S. Basker , Kangguo Cheng , Christopher J. Penny , Theodorus E. Standaert , Junli Wang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Steven J. Meyers; Andrew M. Calderon
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L21/768 ; H01L21/311

Abstract:
Back end of the line (BEOL) capacitors and methods of manufacture are provided. The method includes forming wiring lines on a substrate, with spacing between adjacent wiring lines. The method further includes forming an air gap within spacing between the adjacent wiring lines by deposition of a capping material. The method further includes opening the air gap between selected adjacent wiring lines. The method further includes depositing conductive material within the opened air gap.
Public/Granted literature
- US20170141184A1 CAPACITORS Public/Granted day:2017-05-18
Information query
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