Invention Grant
- Patent Title: Trace/via hybrid structure and method of manufacture
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Application No.: US15819709Application Date: 2017-11-21
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Publication No.: US10170406B2Publication Date: 2019-01-01
- Inventor: Daniel J. Buvid , Eric J. Campbell , Sarah K. Czaplewski , Christopher W. Steffen
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Amronk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Amronk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Nathan M. Rau
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/498 ; H01L21/48

Abstract:
A method of forming an interconnect that includes providing a sacrificial trace structure using an additive forming method. The sacrificial trace structure having a geometry for the interconnect. The method continuous with forming a continuous seed metal layer on the sacrificial trace structure; and removing the sacrificial trace structure, wherein the continuous seed metal layer remains. An interconnect metal layer may be formed on the continuous seed layer. A dielectric material may then be formed on the interconnect metal layer to encapsulate a majority of the interconnect metal layer, wherein ends of the interconnect metal layer are exposed through one surface of the dielectric material to provide an interconnect extending into a dielectric material.
Public/Granted literature
- US20180130736A1 TRACE/VIA HYBRID STRUCTURE AND METHOD OF MANUFACTURE Public/Granted day:2018-05-10
Information query
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