Invention Grant
- Patent Title: Plasma reactor having an array of plural individually controlled gas injectors arranged along a circular side wall
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Application No.: US14923077Application Date: 2015-10-26
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Publication No.: US10170280B2Publication Date: 2019-01-01
- Inventor: Madhavi R. Chandrachood , Michael N. Grimbergen , Khiem K. Nguyen , Richard Lewington , Ibrahim M. Ibrahim , Sheeba J. Panayil , Ajay Kumar
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/458 ; C23C16/52 ; C23C16/455 ; H01L21/67 ; H01L21/687
Abstract:
A plasma reactor has an array of plural gas injectors arranged around a circular side wall that are individually controlled.
Public/Granted literature
Information query
