Invention Grant
- Patent Title: X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
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Application No.: US14774424Application Date: 2014-03-12
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Publication No.: US10096446B2Publication Date: 2018-10-09
- Inventor: Roger Hadland
- Applicant: NIKON METROLOGY NV
- Applicant Address: BE Leuven
- Assignee: NIKON METROLOGY NV
- Current Assignee: NIKON METROLOGY NV
- Current Assignee Address: BE Leuven
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Andrew M. Calderon
- Priority: GB1304870.7 20130315
- International Application: PCT/EP2014/054837 WO 20140312
- International Announcement: WO2014/140099 WO 20140918
- Main IPC: H01J35/04
- IPC: H01J35/04 ; H01J35/02 ; H01J35/10 ; H02M7/10 ; H05G1/12 ; H02M1/32 ; F16C33/76 ; F16C35/04 ; F16J15/16 ; H01J29/48 ; H01J35/16 ; H01J35/06 ; H01J37/065

Abstract:
Disclosed herein are a high-voltage generator (120) for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target (500), and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode (123a, 123b) electrically connected intermediate of a first voltage multiplier (122a, 122b) and a second voltage multiplier (122b, 122c). The electron beam apparatus includes control photodetectors (202a, 202b—not shown) and photo emitters (201a, 202a) having a transparent conductive shield (203a and 203b, 203c—not shown) arranged therebetween. The rotary vacuum seal includes a pumpable chamber (302) at a position intermediate between high-pressure and low-pressure ends of a bore (301) for a rotating shaft (401). The rotary target assembly is configured such that when a torque between a bearing housing (403) and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target (500) has a plurality of target plates (560) supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode (123a) maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
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