Invention Grant
- Patent Title: Gas mixture control in a gas discharge light source
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Application No.: US15495455Application Date: 2017-04-24
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Publication No.: US10090629B2Publication Date: 2018-10-02
- Inventor: Rahul Ahlawat , Tanuj Aggarwal
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBernardino McGovern IP Group LLC
- Main IPC: H01S3/22
- IPC: H01S3/22 ; H01S3/036 ; H01S3/097 ; H01S3/225

Abstract:
A gas discharge light source includes a gas discharge system that includes one or more gas discharge chambers. Each of the gas discharge chambers in the gas discharge system is filled with a respective gas mixture. For each gas discharge chamber, a pulsed energy is supplied to the respective gas mixture by activating its associated energy source to thereby produce a pulsed amplified light beam from the gas discharge chamber. One or more properties of the gas discharge system are determined. A gas maintenance scheme is selected from among a plurality of possible schemes based on the determined one or more properties of the gas discharge system. The selected gas maintenance scheme is applied to the gas discharge system. A gas maintenance scheme includes one or more parameters related to adding one or more supplemental gas mixtures to the gas discharge chambers of the gas discharge system.
Public/Granted literature
- US20170229832A1 GAS MIXTURE CONTROL IN A GAS DISCHARGE LIGHT SOURCE Public/Granted day:2017-08-10
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