- Patent Title: In—Ce—O-based sputtering target and method for producing the same
-
Application No.: US14892653Application Date: 2014-03-25
-
Publication No.: US10090137B2Publication Date: 2018-10-02
- Inventor: Keiichi Sato
- Applicant: SUMITOMO METAL MINING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO METAL MINING CO., LTD.
- Current Assignee: SUMITOMO METAL MINING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2013-126313 20130617
- International Application: PCT/JP2014/058259 WO 20140325
- International Announcement: WO2014/203579 WO 20141224
- Main IPC: C23C14/14
- IPC: C23C14/14 ; H01J37/34 ; C23C14/08 ; C23C14/34 ; C04B35/01 ; C04B35/626 ; B22F3/16 ; B22F9/02 ; B22F9/04 ; C23C14/58

Abstract:
[Object] To provide: an In—Ce—O-based sputtering target capable of suppressing nodules and abnormal discharge over a long period, even though the Ce content based on an atomic ratio of Ce/(In+Ce) is 0.16 to 0.40, at which a high-refractive-index film can be obtained; and a method for producing the In—Ce—O-based sputtering target. [Solving Means] The sputtering target is an In—Ce—O-based sputtering target which is made of an In—Ce—O-based oxide sintered body containing indium oxide as a main component and cerium, and which is used in producing a transparent conductive film having a refractive index of 2.1 or more. The target is characterized in that the Ce content based on the atomic ratio of Ce/(In+Ce) is 0.16 to 0.40, and that cerium oxide particles having a particle diameter of 5 μm or less are dispersed in the In—Ce—O-based oxide sintered body.
Public/Granted literature
- US20160104608A1 In-Ce-O-BASED SPUTTERING TARGET AND METHOD FOR PRODUCING THE SAME Public/Granted day:2016-04-14
Information query
IPC分类: