Invention Grant
- Patent Title: Pulsed light generating method, pulse laser apparatus, exposure apparatus having pulse laser apparatus, and inspection apparatus having pulse laser apparatus
-
Application No.: US15238064Application Date: 2016-08-16
-
Publication No.: US10044160B2Publication Date: 2018-08-07
- Inventor: Naoto Inaba , Akira Tokuhisa
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-028755 20140218
- Main IPC: G03B27/72
- IPC: G03B27/72 ; H01S3/00 ; G03F7/20

Abstract:
A pulsed light generating method for generating a pulsed light by cutting out a laser light outputted from a laser light source with an intensity modulation type electro optic modulator, wherein: the electro optic modulator is driven by use of a drive signal that changes a voltage applied to the electro optic modulator between a voltage lower than a reference voltage and a voltage higher than the reference voltage, the reference voltage being a voltage applied to the electro optic modulator at which a transmittance of the laser light transmitting through the electro optic modulator is local maximum.
Public/Granted literature
Information query